JPS6219939Y2 - - Google Patents
Info
- Publication number
- JPS6219939Y2 JPS6219939Y2 JP1980103954U JP10395480U JPS6219939Y2 JP S6219939 Y2 JPS6219939 Y2 JP S6219939Y2 JP 1980103954 U JP1980103954 U JP 1980103954U JP 10395480 U JP10395480 U JP 10395480U JP S6219939 Y2 JPS6219939 Y2 JP S6219939Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- detection
- purge gas
- pipe
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Measuring Volume Flow (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980103954U JPS6219939Y2 (en]) | 1980-07-24 | 1980-07-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980103954U JPS6219939Y2 (en]) | 1980-07-24 | 1980-07-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5728324U JPS5728324U (en]) | 1982-02-15 |
JPS6219939Y2 true JPS6219939Y2 (en]) | 1987-05-21 |
Family
ID=29465339
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1980103954U Expired JPS6219939Y2 (en]) | 1980-07-24 | 1980-07-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6219939Y2 (en]) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS516754A (en) * | 1974-07-08 | 1976-01-20 | Oval Eng Co Ltd | Ryuryonaishiryusokukeino paajisochi |
-
1980
- 1980-07-24 JP JP1980103954U patent/JPS6219939Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5728324U (en]) | 1982-02-15 |
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